VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
1

NORM
REGULAR
7
0
0
0
0
0
7

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
12
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
101
-0.023622
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
33.854
3333.25
0.31266
0.313066
144.954
0.313066
108.313
0.313062
108.279
0.313059
103.311
0.313056
142.961
0.313053
152.807
0.31305
154.943
0.313046
163.28
0.313043
145.792
0.31304
137.871
0.313037
165.426
0.313034
168.898
0.31303
181.714
0.313027
180.624
0.313024
180.378
0.313021
208.026
0.313018
219.843
0.313014
254.842
0.313011
259.152
0.313008
277.765
0.313005
299.3
0.313002
336.337
0.312998
415.748
0.312995
405.164
0.312992
436.876
0.312989
525.623
0.312986
586.219
0.312982
698.545
0.312979
792.423
0.312976
834.193
0.312973
990.405
0.31297
1080.38
0.312966
1176.31
0.312963
1260.62
0.31296
1452.68
0.312957
1604.41
0.312954
1565.93
0.31295
1615.41
0.312947
1770.2
0.312944
1749.24
0.312941
1855.43
0.312938
1661.78
0.312934
1830.08
0.312931
1751.43
0.312928
1706.52
0.312925
1738.12
0.312922
1666.25
0.312918
1674.7
0.312915
1557.87
0.312912
1571.37
0.312909
1522.77
0.312906
1644.5
0.312902
1703.98
0.312899
1777.59
0.312896
1927.62
0.312893
2030.41
0.31289
2271.91
0.312886
2384.62
0.312883
2454.07
0.31288
2714.02
0.312877
2940.67
0.312874
2880.62
0.31287
3064.62
0.312867
3333.25
0.312864
3248.86
0.312861
3127.98
0.312858
3015.32
0.312854
2961.08
0.312851
2808.29
0.312848
2488.62
0.312845
2330.59
0.312842
2113.98
0.312838
1854.21
0.312835
1498.29
0.312832
1354.78
0.312829
1119.59
0.312826
919.554
0.312822
754.47
0.312819
657.364
0.312816
496.6
0.312813
429.778
0.31281
368.352
0.312806
321.071
0.312803
222.223
0.3128
209.04
0.312797
178.344
0.312794
180.295
0.31279
165.233
0.312787
164.889
0.312784
126.208
0.312781
108.843
0.312778
99.143
0.312774
106.81
0.312771
98.916
0.312768
95.936
0.312765
81.098
0.312762
63.198
0.312759
77.994
0.312755
73.442
0.312752
65.068
0.312749
68.47
0.312746
68.198
0.312743
65.169
0.312739
62.092
0.312736
65.131
0.312733
49.351
0.31273
58.857
0.312727
58.178
0.312723
70.772
0.31272
52.777
0.312717
47.341
0.312714
61.283
0.312711
47.756
0.312707
50.477
0.312704
42.692
0.312701
37.353
0.312698
51.07
0.312695
40.035
0.312691
45.137
0.312688
56.798
0.312685
35.659
0.312682
41.878
0.312679
43.576
0.312676
41.451
0.312672
38.419
0.312669
33.854
0.312666
64.034
0.312663
44.112
0.31266

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
12
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
2048
85
54100
0.300125
0.586563
6960
0.586563
6806
0.585857
6584
0.585154
6565
0.584452
6424
0.583753
6430
0.583056
6416
0.582362
6214
0.581669
6340
0.580979
6242
0.580291
6324
0.579605
6317
0.578921
6447
0.578239
6453
0.57756
6490
0.576883
6798
0.576207
6882
0.575534
7203
0.574863
7509
0.574194
7986
0.573527
8503
0.572862
8847
0.5722
9102
0.571539
8575
0.57088
8055
0.570223
7407
0.569569
6970
0.568916
6560
0.568265
6388
0.567617
6063
0.56697
5807
0.566325
5559
0.565682
5374
0.565041
5187
0.564402
5064
0.563765
5024
0.56313
4793
0.562497
4894
0.561866
4818
0.561236
4788
0.560609
4955
0.559983
4732
0.559359
4771
0.558737
4715
0.558117
4766
0.557499
4821
0.556882
4972
0.556268
5175
0.555655
5129
0.555044
4828
0.554434
4677
0.553827
4626
0.553221
4786
0.552617
4851
0.552015
4852
0.551415
4627
0.550816
4749
0.550219
4690
0.549624
4628
0.54903
4848
0.548438
4655
0.547848
4805
0.54726
4702
0.546673
4787
0.546088
4744
0.545504
4891
0.544922
5092
0.544342
5534
0.543764
5535
0.543187
4842
0.542612
4820
0.542038
4685
0.541466
4804
0.540896
4654
0.540327
4740
0.53976
4747
0.539194
4612
0.53863
4637
0.538068
4796
0.537507
4729
0.536948
4671
0.53639
4767
0.535834
4800
0.535279
4841
0.534726
4721
0.534174
4856
0.533624
4790
0.533075
4836
0.532528
4868
0.531983
4846
0.531438
4939
0.530896
4838
0.530355
4774
0.529815
4807
0.529277
4841
0.52874
4814
0.528204
4771
0.527671
4740
0.527138
4798
0.526607
4890
0.526077
4872
0.525549
4941
0.525022
4875
0.524497
4887
0.523973
4835
0.52345
4775
0.522929
4891
0.522409
4905
0.521891
5013
0.521374
4950
0.520858
4863
0.520344
4906
0.519831
4807
0.519319
5065
0.518809
5071
0.5183
4941
0.517792
4954
0.517286
4920
0.516781
5011
0.516277
4982
0.515775
4880
0.515274
4887
0.514774
5005
0.514276
5099
0.513778
4957
0.513282
5096
0.512788
5009
0.512294
5005
0.511802
4964
0.511311
5084
0.510822
5097
0.510333
5016
0.509846
5112
0.50936
5137
0.508876
5104
0.508392
5158
0.50791
5027
0.507429
5100
0.506949
5191
0.506471
5067
0.505993
5120
0.505517
5077
0.505042
5084
0.504569
5092
0.504096
5152
0.503625
5097
0.503154
5171
0.502685
5065
0.502217
5208
0.501751
5215
0.501285
5049
0.500821
5234
0.500357
5169
0.499895
5162
0.499434
5198
0.498974
5076
0.498515
5318
0.498058
5212
0.497601
5086
0.497146
5456
0.496692
5238
0.496238
5139
0.495786
5305
0.495335
5248
0.494885
5333
0.494437
5305
0.493989
5328
0.493542
5206
0.493097
5241
0.492652
5335
0.492209
5220
0.491766
5392
0.491325
5315
0.490885
5222
0.490445
5366
0.490007
5371
0.48957
5390
0.489134
5395
0.488699
5284
0.488265
5354
0.487832
5412
0.4874
5365
0.486969
5278
0.486539
5332
0.48611
5299
0.485682
5411
0.485255
5385
0.48483
5529
0.484405
5530
0.483981
5413
0.483558
5408
0.483136
5353
0.482715
5535
0.482295
5575
0.481876
5306
0.481458
5474
0.481041
5565
0.480624
5501
0.480209
5583
0.479795
5443
0.479382
5446
0.47897
5481
0.478558
5502
0.478148
5482
0.477738
5592
0.47733
5629
0.476922
5570
0.476515
5492
0.47611
5604
0.475705
5646
0.475301
5621
0.474898
5718
0.474496
5487
0.474094
5689
0.473694
5764
0.473295
5623
0.472896
5589
0.472499
5714
0.472102
5589
0.471706
5656
0.471311
5602
0.470917
5620
0.470524
5757
0.470131
5682
0.46974
5820
0.469349
5615
0.46896
5817
0.468571
5693
0.468183
5801
0.467796
5695
0.467409
5907
0.467024
5730
0.466639
5823
0.466256
5943
0.465873
5773
0.465491
5753
0.465109
5789
0.464729
5719
0.464349
5763
0.463971
5853
0.463593
5850
0.463215
5840
0.462839
5901
0.462464
5782
0.462089
5860
0.461715
5923
0.461342
5744
0.46097
5916
0.460598
5900
0.460228
5961
0.459858
5959
0.459489
5991
0.459121
5937
0.458753
6000
0.458386
5811
0.45802
5986
0.457655
5972
0.457291
5883
0.456927
5986
0.456564
5903
0.456202
5856
0.455841
6073
0.455481
5925
0.455121
6055
0.454762
6008
0.454403
5972
0.454046
5980
0.453689
5908
0.453333
5961
0.452978
6009
0.452623
6041
0.452269
6100
0.451916
5945
0.451564
6027
0.451213
6121
0.450862
6195
0.450511
6274
0.450162
6119
0.449813
6086
0.449465
5993
0.449118
6223
0.448772
6147
0.448426
6164
0.448081
6266
0.447736
6192
0.447393
6201
0.44705
6293
0.446707
6020
0.446366
6224
0.446025
6226
0.445684
6202
0.445345
6271
0.445006
6258
0.444668
6304
0.44433
6315
0.443994
6331
0.443658
6282
0.443322
6067
0.442987
6237
0.442653
6218
0.44232
6288
0.441987
6245
0.441655
6337
0.441324
6395
0.440993
6326
0.440663
6462
0.440333
6193
0.440005
6266
0.439676
6374
0.439349
6447
0.439022
6339
0.438696
6456
0.438371
6515
0.438046
6512
0.437721
6499
0.437398
6509
0.437075
6379
0.436752
6412
0.436431
6542
0.43611
6452
0.435789
6488
0.435469
6507
0.43515
6490
0.434832
6550
0.434514
6559
0.434196
6535
0.43388
6496
0.433564
6621
0.433248
6571
0.432933
6544
0.432619
6695
0.432305
6557
0.431992
6586
0.43168
6657
0.431368
6815
0.431057
6689
0.430746
6699
0.430436
6615
0.430127
6659
0.429818
6782
0.42951
6764
0.429202
6680
0.428895
6619
0.428588
6620
0.428282
6819
0.427977
6817
0.427672
6746
0.427368
6831
0.427065
6775
0.426762
7077
0.426459
6813
0.426157
6778
0.425856
6909
0.425555
6989
0.425255
6912
0.424955
6857
0.424656
6793
0.424358
7045
0.42406
6905
0.423762
7057
0.423466
7111
0.423169
6830
0.422874
6844
0.422579
7161
0.422284
6869
0.42199
6771
0.421696
7028
0.421403
6997
0.421111
7000
0.420819
7017
0.420528
7003
0.420237
7069
0.419946
7099
0.419657
6966
0.419368
7117
0.419079
7005
0.418791
7231
0.418503
7374
0.418216
7316
0.417929
7185
0.417643
7267
0.417358
7155
0.417073
7195
0.416788
7280
0.416504
7385
0.416221
7270
0.415938
7283
0.415655
7351
0.415373
7236
0.415092
7299
0.414811
7313
0.414531
7414
0.414251
7337
0.413971
7250
0.413693
7319
0.413414
7389
0.413136
7334
0.412859
7417
0.412582
7500
0.412305
7453
0.41203
7425
0.411754
7486
0.411479
7539
0.411205
7507
0.410931
7884
0.410657
7732
0.410384
7652
0.410112
7764
0.40984
7770
0.409568
7875
0.409297
7722
0.409027
7724
0.408757
7656
0.408487
7662
0.408218
7735
0.407949
7821
0.407681
7850
0.407413
7897
0.407146
7903
0.406879
7864
0.406613
7969
0.406347
7970
0.406081
8029
0.405816
8130
0.405552
8172
0.405288
7973
0.405024
8192
0.404761
8127
0.404499
8150
0.404236
8025
0.403975
8288
0.403713
8190
0.403452
8150
0.403192
8383
0.402932
8223
0.402673
8460
0.402414
8269
0.402155
8207
0.401897
8336
0.401639
8433
0.401382
8358
0.401125
8523
0.400868
8419
0.400612
8440
0.400357
8447
0.400102
8515
0.399847
8435
0.399593
8705
0.399339
8883
0.399086
8859
0.398833
8834
0.39858
8910
0.398328
9072
0.398076
9151
0.397825
9313
0.397574
8899
0.397324
9269
0.397074
9166
0.396824
9015
0.396575
9098
0.396326
8867
0.396078
8797
0.39583
8943
0.395583
8822
0.395335
8809
0.395089
8607
0.394843
8616
0.394597
8519
0.394351
8432
0.394106
8633
0.393862
8380
0.393617
8411
0.393374
8366
0.39313
8399
0.392887
8557
0.392644
9595
0.392402
13625
0.39216
25252
0.391919
32781
0.391678
19171
0.391437
9433
0.391197
8156
0.390957
8189
0.390718
7780
0.390479
7833
0.39024
7715
0.390002
7696
0.389764
7782
0.389526
7745
0.389289
7720
0.389052
7629
0.388816
7606
0.38858
7548
0.388344
7773
0.388109
7806
0.387874
7639
0.38764
7687
0.387406
7817
0.387172
7735
0.386939
7783
0.386706
7857
0.386473
7719
0.386241
7931
0.386009
8079
0.385778
7743
0.385547
7708
0.385316
7851
0.385086
7872
0.384856
7778
0.384626
7870
0.384397
7925
0.384168
8082
0.383939
7782
0.383711
7753
0.383483
7876
0.383256
8116
0.383029
7886
0.382802
8010
0.382576
8016
0.38235
8055
0.382124
7940
0.381899
8129
0.381674
8137
0.381449
7988
0.381225
8227
0.381001
7954
0.380777
8022
0.380554
8027
0.380331
7987
0.380109
8121
0.379887
8043
0.379665
8019
0.379443
8159
0.379222
8049
0.379001
7872
0.378781
8002
0.378561
8065
0.378341
8142
0.378122
8149
0.377903
7860
0.377684
8094
0.377465
8069
0.377247
8264
0.37703
8181
0.376812
8349
0.376595
8185
0.376379
8103
0.376162
8264
0.375946
8396
0.37573
8346
0.375515
8244
0.3753
8259
0.375085
8413
0.374871
8392
0.374657
8299
0.374443
8191
0.374229
8515
0.374016
8359
0.373803
8260
0.373591
8334
0.373379
8398
0.373167
8447
0.372956
8467
0.372744
8443
0.372533
8382
0.372323
8273
0.372113
8495
0.371903
8396
0.371693
8608
0.371484
8672
0.371275
8448
0.371066
8388
0.370858
8532
0.37065
8313
0.370442
8610
0.370235
8570
0.370028
8495
0.369821
8641
0.369614
8554
0.369408
8537
0.369202
8572
0.368997
8645
0.368791
8602
0.368586
8565
0.368382
8626
0.368177
8694
0.367973
8526
0.36777
8624
0.367566
8745
0.367363
8807
0.36716
8676
0.366958
8896
0.366755
8910
0.366553
8763
0.366352
8822
0.36615
8762
0.365949
8822
0.365749
8919
0.365548
8699
0.365348
8824
0.365148
8951
0.364948
8670
0.364749
8810
0.36455
8901
0.364351
8998
0.364153
8883
0.363955
8863
0.363757
8881
0.363559
8876
0.363362
8932
0.363165
9148
0.362968
9143
0.362772
9099
0.362576
9303
0.36238
9147
0.362184
8820
0.361989
8951
0.361794
9060
0.361599
8886
0.361404
9047
0.36121
8970
0.361016
9165
0.360823
9302
0.360629
9113
0.360436
8979
0.360243
9118
0.360051
9086
0.359859
9153
0.359667
9151
0.359475
9187
0.359283
9100
0.359092
9134
0.358901
9194
0.358711
9282
0.35852
9171
0.35833
9147
0.35814
9148
0.357951
9290
0.357762
9198
0.357573
9189
0.357384
9472
0.357195
9206
0.357007
9368
0.356819
9468
0.356631
9250
0.356444
9158
0.356257
9466
0.35607
9569
0.355883
9447
0.355697
9508
0.355511
9567
0.355325
9494
0.355139
9467
0.354954
9334
0.354769
9504
0.354584
9522
0.354399
9544
0.354215
9377
0.354031
9582
0.353847
9430
0.353664
9553
0.35348
9661
0.353297
9628
0.353114
9584
0.352932
9604
0.352749
9413
0.352567
9699
0.352386
9676
0.352204
9698
0.352023
9867
0.351842
9835
0.351661
9629
0.35148
9879
0.3513
9884
0.35112
9785
0.35094
9804
0.350761
9809
0.350581
9663
0.350402
9793
0.350223
9891
0.350045
10169
0.349866
10129
0.349688
9899
0.34951
9875
0.349333
10242
0.349155
10285
0.348978
9986
0.348801
9969
0.348625
10026
0.348448
10080
0.348272
10166
0.348096
10217
0.34792
10245
0.347745
10143
0.34757
10134
0.347395
10382
0.34722
10215
0.347045
10353
0.346871
10334
0.346697
10508
0.346523
10496
0.34635
10449
0.346176
10461
0.346003
10425
0.34583
10390
0.345657
10511
0.345485
10539
0.345313
10516
0.345141
10670
0.344969
10512
0.344797
10582
0.344626
10528
0.344455
10521
0.344284
10439
0.344113
10568
0.343943
10708
0.343773
10711
0.343603
10669
0.343433
10505
0.343264
10677
0.343094
10442
0.342925
10515
0.342756
10440
0.342588
10185
0.342419
10689
0.342251
10618
0.342083
10827
0.341916
10936
0.341748
11537
0.341581
12789
0.341414
17026
0.341247
19757
0.34108
14000
0.340914
10791
0.340747
10686
0.340581
10448
0.340416
10585
0.34025
10628
0.340085
10616
0.33992
10518
0.339755
10507
0.33959
10544
0.339425
10549
0.339261
10609
0.339097
10629
0.338933
10761
0.33877
10753
0.338606
10845
0.338443
10843
0.33828
10765
0.338117
10683
0.337954
10778
0.337792
10759
0.33763
10823
0.337468
11034
0.337306
10799
0.337144
10938
0.336983
11146
0.336822
11113
0.336661
11083
0.3365
11236
0.33634
11214
0.336179
11245
0.336019
11187
0.335859
11415
0.3357
11080
0.33554
11355
0.335381
11085
0.335222
11458
0.335063
11548
0.334904
11413
0.334745
11380
0.334587
11514
0.334429
11508
0.334271
11524
0.334113
11709
0.333956
11851
0.333798
11766
0.333641
11919
0.333484
11851
0.333328
12162
0.333171
11929
0.333015
11928
0.332859
11981
0.332703
12133
0.332547
11925
0.332391
12212
0.332236
11995
0.332081
12217
0.331926
12330
0.331771
12121
0.331616
12453
0.331462
12397
0.331308
12701
0.331154
12800
0.331
12628
0.330846
13059
0.330693
12921
0.33054
12947
0.330386
13414
0.330234
13031
0.330081
12873
0.329928
12961
0.329776
12662
0.329624
12913
0.329472
12978
0.32932
13107
0.329169
13199
0.329017
13326
0.328866
13314
0.328715
13652
0.328564
13643
0.328414
14196
0.328263
14215
0.328113
14462
0.327963
14575
0.327813
14566
0.327663
14499
0.327513
14506
0.327364
14443
0.327215
14085
0.327066
14075
0.326917
13890
0.326768
13857
0.32662
14103
0.326472
13957
0.326324
14188
0.326176
14773
0.326028
14926
0.32588
15431
0.325733
15774
0.325586
16411
0.325439
17122
0.325292
17014
0.325145
16964
0.324999
16487
0.324852
15971
0.324706
15181
0.32456
14730
0.324414
14355
0.324269
14105
0.324123
14192
0.323978
14032
0.323833
14470
0.323688
14701
0.323543
15019
0.323399
15898
0.323254
16884
0.32311
18472
0.322966
20091
0.322822
22284
0.322678
22933
0.322535
21385
0.322391
18925
0.322248
16321
0.322105
14405
0.321962
13222
0.321819
12581
0.321677
12129
0.321534
11910
0.321392
11746
0.32125
11569
0.321108
11732
0.320967
11774
0.320825
12570
0.320684
14507
0.320543
16463
0.320401
23257
0.320261
46719
0.32012
50535
0.319979
21237
0.319839
12062
0.319699
10007
0.319559
8961
0.319419
8328
0.319279
8040
0.31914
7900
0.319
7824
0.318861
7655
0.318722
7887
0.318583
8036
0.318444
8366
0.318306
8888
0.318167
9306
0.318029
9749
0.317891
10085
0.317753
10127
0.317615
9754
0.317477
9116
0.31734
8382
0.317203
7879
0.317065
7395
0.316928
7175
0.316792
7070
0.316655
6973
0.316518
6971
0.316382
7103
0.316246
7279
0.31611
7709
0.315974
8113
0.315838
9297
0.315702
10959
0.315567
12906
0.315432
15028
0.315297
14283
0.315162
11521
0.315027
8686
0.314892
6857
0.314758
5944
0.314623
5133
0.314489
4711
0.314355
4437
0.314221
4181
0.314087
4057
0.313954
3732
0.31382
3389
0.313687
3762
0.313554
4881
0.313421
5680
0.313288
6761
0.313155
22001
0.313023
54100
0.31289
20017
0.312758
2219
0.312626
1421
0.312494
1089
0.312362
954
0.312231
868
0.312099
798
0.311968
713
0.311837
722
0.311705
686
0.311575
687
0.311444
627
0.311313
696
0.311183
673
0.311052
666
0.310922
679
0.310792
734
0.310662
683
0.310533
692
0.310403
771
0.310273
724
0.310144
721
0.310015
690
0.309886
743
0.309757
732
0.309628
748
0.3095
677
0.309371
713
0.309243
739
0.309115
731
0.308987
722
0.308859
740
0.308731
693
0.308603
741
0.308476
754
0.308349
729
0.308221
796
0.308094
765
0.307967
803
0.307841
808
0.307714
850
0.307588
800
0.307461
797
0.307335
809
0.307209
810
0.307083
788
0.306957
822
0.306832
817
0.306706
777
0.306581
791
0.306455
814
0.30633
927
0.306205
863
0.30608
870
0.305956
939
0.305831
933
0.305707
985
0.305582
974
0.305458
984
0.305334
945
0.30521
961
0.305087
931
0.304963
910
0.304839
905
0.304716
871
0.304593
863
0.30447
880
0.304347
836
0.304224
927
0.304101
926
0.303979
1033
0.303856
1156
0.303734
1226
0.303612
1420
0.30349
1553
0.303368
1664
0.303246
1558
0.303124
1385
0.303003
1189
0.302881
1130
0.30276
1018
0.302639
992
0.302518
859
0.302397
740
0.302276
656
0.302156
640
0.302035
750
0.301915
876
0.301795
1014
0.301674
1175
0.301554
1339
0.301435
1373
0.301315
1277
0.301195
1485
0.301076
1285
0.300956
984
0.300837
926
0.300718
1131
0.300599
1019
0.30048
718
0.300362
315
0.300243
85
0.300125

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
112
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
100
4.00E-06
0
0
0
0
512
127
6723
0.311852
0.314566
486
0.314566
405
0.314556
445
0.314545
423
0.314534
398
0.314523
445
0.314512
416
0.314502
419
0.314491
403
0.31448
428
0.314469
404
0.314459
424
0.314448
383
0.314437
397
0.314426
442
0.314416
375
0.314405
388
0.314394
357
0.314383
404
0.314373
407
0.314362
423
0.314351
413
0.31434
386
0.31433
400
0.314319
429
0.314308
357
0.314297
392
0.314287
403
0.314276
406
0.314265
408
0.314254
415
0.314244
388
0.314233
338
0.314222
353
0.314211
372
0.314201
358
0.31419
382
0.314179
380
0.314169
390
0.314158
399
0.314147
356
0.314136
347
0.314126
380
0.314115
343
0.314104
359
0.314093
349
0.314083
351
0.314072
407
0.314061
379
0.314051
434
0.31404
377
0.314029
416
0.314018
380
0.314008
358
0.313997
385
0.313986
375
0.313975
348
0.313965
360
0.313954
350
0.313943
364
0.313933
367
0.313922
376
0.313911
385
0.313901
350
0.31389
375
0.313879
358
0.313868
322
0.313858
323
0.313847
357
0.313836
369
0.313826
341
0.313815
364
0.313804
320
0.313793
348
0.313783
366
0.313772
301
0.313761
323
0.313751
345
0.31374
339
0.313729
298
0.313719
279
0.313708
288
0.313697
292
0.313687
317
0.313676
252
0.313665
314
0.313654
294
0.313644
314
0.313633
298
0.313622
277
0.313612
303
0.313601
279
0.31359
311
0.31358
325
0.313569
295
0.313558
325
0.313548
297
0.313537
315
0.313526
343
0.313516
375
0.313505
353
0.313494
345
0.313484
398
0.313473
402
0.313462
378
0.313452
413
0.313441
432
0.31343
489
0.31342
393
0.313409
390
0.313398
415
0.313388
451
0.313377
416
0.313366
461
0.313356
438
0.313345
438
0.313334
438
0.313324
439
0.313313
414
0.313302
451
0.313292
395
0.313281
375
0.31327
471
0.31326
410
0.313249
365
0.313238
383
0.313228
390
0.313217
362
0.313207
353
0.313196
364
0.313185
360
0.313175
309
0.313164
315
0.313153
367
0.313143
331
0.313132
351
0.313121
365
0.313111
350
0.3131
391
0.313089
409
0.313079
418
0.313068
428
0.313058
521
0.313047
623
0.313036
826
0.313026
1019
0.313015
1472
0.313004
1931
0.312994
2642
0.312983
3345
0.312973
3833
0.312962
4110
0.312951
4030
0.312941
3629
0.31293
3668
0.312919
4005
0.312909
5053
0.312898
5984
0.312888
6723
0.312877
6463
0.312866
5470
0.312856
3960
0.312845
2329
0.312835
1338
0.312824
735
0.312813
486
0.312803
330
0.312792
255
0.312781
213
0.312771
220
0.31276
178
0.31275
158
0.312739
151
0.312728
142
0.312718
143
0.312707
132
0.312697
133
0.312686
127
0.312675
127
0.312665
158
0.312654
137
0.312644
174
0.312633
165
0.312622
148
0.312612
166
0.312601
185
0.312591
173
0.31258
145
0.31257
146
0.312559
152
0.312548
175
0.312538
148
0.312527
151
0.312517
193
0.312506
167
0.312495
145
0.312485
185
0.312474
155
0.312464
145
0.312453
178
0.312443
151
0.312432
156
0.312421
172
0.312411
195
0.3124
171
0.31239
164
0.312379
187
0.312369
172
0.312358
222
0.312347
217
0.312337
201
0.312326
173
0.312316
185
0.312305
202
0.312295
189
0.312284
187
0.312273
209
0.312263
182
0.312252
185
0.312242
159
0.312231
185
0.312221
180
0.31221
161
0.3122
165
0.312189
182
0.312178
169
0.312168
175
0.312157
168
0.312147
205
0.312136
208
0.312126
173
0.312115
175
0.312105
179
0.312094
199
0.312083
187
0.312073
199
0.312062
203
0.312052
227
0.312041
194
0.312031
179
0.31202
192
0.31201
177
0.311999
191
0.311989
146
0.311978
195
0.311968
171
0.311957
179
0.311947
181
0.311936
181
0.311925
196
0.311915
200
0.311904
192
0.311894
173
0.311883
190
0.311873
192
0.311862
162
0.311852

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
542
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
100
4.00E-06
0
0
0
0
512
766
3984
0.389054
0.393976
913
0.393976
871
0.393956
925
0.393936
922
0.393917
934
0.393897
881
0.393877
901
0.393858
952
0.393838
934
0.393819
951
0.393799
1002
0.393779
996
0.39376
913
0.39374
941
0.393721
947
0.393701
943
0.393681
931
0.393662
948
0.393642
928
0.393623
865
0.393603
890
0.393583
906
0.393564
903
0.393544
941
0.393525
972
0.393505
885
0.393486
930
0.393466
909
0.393447
909
0.393427
904
0.393407
926
0.393388
954
0.393368
913
0.393349
968
0.393329
929
0.39331
931
0.39329
874
0.393271
889
0.393251
894
0.393232
896
0.393212
921
0.393193
897
0.393173
975
0.393153
919
0.393134
918
0.393114
954
0.393095
934
0.393075
895
0.393056
919
0.393036
853
0.393017
865
0.392997
922
0.392978
906
0.392958
924
0.392939
897
0.392919
928
0.3929
940
0.39288
917
0.392861
887
0.392841
946
0.392822
862
0.392803
972
0.392783
922
0.392764
872
0.392744
874
0.392725
901
0.392705
960
0.392686
979
0.392666
913
0.392647
910
0.392627
889
0.392608
926
0.392589
900
0.392569
933
0.39255
889
0.39253
885
0.392511
933
0.392491
978
0.392472
840
0.392452
904
0.392433
851
0.392414
905
0.392394
917
0.392375
920
0.392355
867
0.392336
964
0.392317
917
0.392297
962
0.392278
910
0.392258
982
0.392239
983
0.39222
959
0.3922
978
0.392181
1075
0.392161
1042
0.392142
1097
0.392123
1155
0.392103
1198
0.392084
1217
0.392064
1197
0.392045
1298
0.392026
1352
0.392006
1438
0.391987
1561
0.391968
1600
0.391948
1658
0.391929
1716
0.39191
1918
0.39189
2103
0.391871
2255
0.391852
2471
0.391832
2660
0.391813
2792
0.391793
2992
0.391774
3109
0.391755
3277
0.391735
3583
0.391716
3679
0.391697
3814
0.391677
3819
0.391658
3917
0.391639
3984
0.39162
3787
0.3916
3861
0.391581
3841
0.391562
3613
0.391542
3550
0.391523
3314
0.391504
3112
0.391484
2917
0.391465
2581
0.391446
2316
0.391426
2202
0.391407
1927
0.391388
1805
0.391369
1571
0.391349
1392
0.39133
1376
0.391311
1174
0.391292
1021
0.391272
986
0.391253
980
0.391234
908
0.391214
884
0.391195
905
0.391176
897
0.391157
910
0.391137
809
0.391118
851
0.391099
856
0.39108
898
0.39106
870
0.391041
861
0.391022
866
0.391003
887
0.390983
881
0.390964
846
0.390945
840
0.390926
843
0.390907
829
0.390887
895
0.390868
864
0.390849
862
0.39083
837
0.39081
845
0.390791
904
0.390772
877
0.390753
851
0.390734
949
0.390714
840
0.390695
889
0.390676
896
0.390657
889
0.390638
873
0.390619
853
0.390599
865
0.39058
844
0.390561
847
0.390542
919
0.390523
820
0.390503
858
0.390484
845
0.390465
912
0.390446
859
0.390427
849
0.390408
872
0.390388
855
0.390369
880
0.39035
863
0.390331
861
0.390312
884
0.390293
853
0.390274
841
0.390254
870
0.390235
889
0.390216
810
0.390197
826
0.390178
828
0.390159
797
0.39014
885
0.390121
766
0.390101
804
0.390082
864
0.390063
824
0.390044
826
0.390025
835
0.390006
845
0.389987
818
0.389968
873
0.389949
855
0.389929
823
0.38991
839
0.389891
849
0.389872
902
0.389853
907
0.389834
821
0.389815
843
0.389796
843
0.389777
840
0.389758
857
0.389739
826
0.38972
843
0.389701
890
0.389681
872
0.389662
854
0.389643
866
0.389624
875
0.389605
822
0.389586
856
0.389567
855
0.389548
843
0.389529
866
0.38951
871
0.389491
778
0.389472
849
0.389453
845
0.389434
873
0.389415
862
0.389396
908
0.389377
873
0.389358
846
0.389339
905
0.38932
888
0.389301
908
0.389282
851
0.389263
837
0.389244
892
0.389225
852
0.389206
930
0.389187
872
0.389168
823
0.389149
839
0.38913
865
0.389111
892
0.389092
862
0.389073
852
0.389054

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_5
data_5
-1
Binding energy
eV
164
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
100
4.00E-06
0
0
0
0
512
531
5017
0.319044
0.32193
955
0.32193
941
0.321918
915
0.321907
990
0.321895
920
0.321884
969
0.321872
957
0.321861
880
0.321849
917
0.321838
925
0.321827
934
0.321815
914
0.321804
868
0.321792
937
0.321781
919
0.321769
926
0.321758
941
0.321746
889
0.321735
976
0.321724
916
0.321712
924
0.321701
844
0.321689
838
0.321678
889
0.321666
861
0.321655
834
0.321644
797
0.321632
810
0.321621
849
0.321609
828
0.321598
831
0.321586
822
0.321575
845
0.321564
853
0.321552
867
0.321541
847
0.321529
841
0.321518
841
0.321507
855
0.321495
840
0.321484
844
0.321472
854
0.321461
813
0.321449
888
0.321438
818
0.321427
872
0.321415
790
0.321404
824
0.321392
810
0.321381
860
0.32137
782
0.321358
850
0.321347
806
0.321335
811
0.321324
865
0.321313
840
0.321301
824
0.32129
842
0.321278
841
0.321267
801
0.321256
863
0.321244
835
0.321233
826
0.321221
804
0.32121
815
0.321199
794
0.321187
792
0.321176
855
0.321165
821
0.321153
850
0.321142
839
0.32113
798
0.321119
821
0.321108
796
0.321096
836
0.321085
833
0.321074
786
0.321062
832
0.321051
774
0.321039
818
0.321028
798
0.321017
811
0.321005
845
0.320994
841
0.320983
794
0.320971
794
0.32096
813
0.320949
768
0.320937
813
0.320926
767
0.320914
806
0.320903
858
0.320892
821
0.32088
805
0.320869
740
0.320858
797
0.320846
738
0.320835
780
0.320824
835
0.320812
839
0.320801
764
0.32079
812
0.320778
737
0.320767
821
0.320756
784
0.320744
806
0.320733
864
0.320721
843
0.32071
826
0.320699
831
0.320687
847
0.320676
917
0.320665
845
0.320653
925
0.320642
875
0.320631
885
0.320619
911
0.320608
842
0.320597
948
0.320585
942
0.320574
936
0.320563
936
0.320552
1018
0.32054
1014
0.320529
1065
0.320518
1052
0.320506
1040
0.320495
1036
0.320484
945
0.320472
1027
0.320461
1025
0.32045
1022
0.320438
1040
0.320427
1087
0.320416
999
0.320404
1019
0.320393
1055
0.320382
1038
0.32037
1063
0.320359
1114
0.320348
1100
0.320337
1158
0.320325
1125
0.320314
1247
0.320303
1203
0.320291
1173
0.32028
1247
0.320269
1310
0.320257
1300
0.320246
1433
0.320235
1520
0.320224
1582
0.320212
1694
0.320201
1800
0.32019
1978
0.320178
2033
0.320167
2343
0.320156
2627
0.320145
2750
0.320133
3222
0.320122
3600
0.320111
3900
0.320099
4286
0.320088
4622
0.320077
4742
0.320066
4936
0.320054
5017
0.320043
4933
0.320032
4628
0.32002
4184
0.320009
3840
0.319998
3503
0.319987
3140
0.319975
2725
0.319964
2433
0.319953
2131
0.319942
1994
0.31993
1732
0.319919
1579
0.319908
1363
0.319896
1337
0.319885
1293
0.319874
1148
0.319863
1123
0.319851
1076
0.31984
1034
0.319829
979
0.319818
959
0.319806
932
0.319795
934
0.319784
812
0.319773
800
0.319761
794
0.31975
796
0.319739
708
0.319728
768
0.319716
761
0.319705
711
0.319694
781
0.319683
731
0.319671
706
0.31966
698
0.319649
656
0.319638
752
0.319626
752
0.319615
707
0.319604
705
0.319593
662
0.319582
677
0.31957
657
0.319559
659
0.319548
660
0.319537
704
0.319525
665
0.319514
640
0.319503
648
0.319492
660
0.319481
677
0.319469
602
0.319458
657
0.319447
660
0.319436
585
0.319424
568
0.319413
634
0.319402
598
0.319391
626
0.31938
600
0.319368
590
0.319357
610
0.319346
541
0.319335
604
0.319323
613
0.319312
640
0.319301
624
0.31929
638
0.319279
653
0.319267
612
0.319256
585
0.319245
666
0.319234
611
0.319223
575
0.319211
570
0.3192
578
0.319189
645
0.319178
626
0.319167
629
0.319155
642
0.319144
571
0.319133
626
0.319122
599
0.319111
584
0.3191
531
0.319088
593
0.319077
618
0.319066
574
0.319055
569
0.319044

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_6
data_6
-1
Binding energy
eV
15
-0.0522193
2
counts
d
Transmission
d
pulse counting
0.2
100
4.00E-06
0
0
0
0
768
183
2645
0.299521
0.301956
1368
0.301956
1340
0.30195
1366
0.301943
1342
0.301937
1347
0.301931
1381
0.301924
1387
0.301918
1397
0.301911
1487
0.301905
1418
0.301898
1338
0.301892
1375
0.301886
1437
0.301879
1434
0.301873
1473
0.301866
1524
0.30186
1416
0.301854
1512
0.301847
1465
0.301841
1506
0.301834
1517
0.301828
1558
0.301821
1533
0.301815
1553
0.301809
1545
0.301802
1561
0.301796
1556
0.301789
1579
0.301783
1593
0.301776
1614
0.30177
1613
0.301764
1600
0.301757
1558
0.301751
1652
0.301744
1637
0.301738
1595
0.301732
1606
0.301725
1593
0.301719
1695
0.301712
1693
0.301706
1708
0.301699
1683
0.301693
1686
0.301687
1731
0.30168
1678
0.301674
1791
0.301667
1739
0.301661
1802
0.301655
1864
0.301648
1849
0.301642
1830
0.301635
1935
0.301629
1887
0.301623
1889
0.301616
1923
0.30161
1973
0.301603
1908
0.301597
1915
0.30159
1976
0.301584
2012
0.301578
1968
0.301571
1974
0.301565
1981
0.301558
2012
0.301552
2119
0.301546
2053
0.301539
2127
0.301533
2135
0.301526
2091
0.30152
2123
0.301514
2110
0.301507
2143
0.301501
2207
0.301494
2207
0.301488
2191
0.301482
2190
0.301475
2208
0.301469
2189
0.301462
2243
0.301456
2227
0.30145
2260
0.301443
2208
0.301437
2184
0.30143
2177
0.301424
2187
0.301418
2197
0.301411
2161
0.301405
2187
0.301398
2204
0.301392
2160
0.301386
2180
0.301379
2109
0.301373
2227
0.301366
2147
0.30136
2083
0.301354
2143
0.301347
2092
0.301341
2115
0.301334
2127
0.301328
2057
0.301322
1968
0.301315
1978
0.301309
2093
0.301302
2036
0.301296
1986
0.30129
1977
0.301283
1988
0.301277
1922
0.301271
2024
0.301264
2099
0.301258
2015
0.301251
1940
0.301245
2035
0.301239
2014
0.301232
1993
0.301226
2014
0.301219
1983
0.301213
2009
0.301207
2035
0.3012
2074
0.301194
2058
0.301187
2096
0.301181
2105
0.301175
2138
0.301168
2234
0.301162
2278
0.301156
2283
0.301149
2302
0.301143
2311
0.301136
2461
0.30113
2470
0.301124
2420
0.301117
2499
0.301111
2584
0.301104
2524
0.301098
2645
0.301092
2543
0.301085
2379
0.301079
2508
0.301073
2483
0.301066
2521
0.30106
2443
0.301053
2450
0.301047
2395
0.301041
2352
0.301034
2388
0.301028
2305
0.301022
2286
0.301015
2244
0.301009
2172
0.301002
2085
0.300996
2105
0.30099
2037
0.300983
1959
0.300977
1898
0.300971
1922
0.300964
1872
0.300958
1858
0.300951
1867
0.300945
1815
0.300939
1742
0.300932
1723
0.300926
1566
0.30092
1642
0.300913
1502
0.300907
1520
0.3009
1533
0.300894
1451
0.300888
1382
0.300881
1465
0.300875
1418
0.300869
1371
0.300862
1376
0.300856
1376
0.30085
1334
0.300843
1324
0.300837
1318
0.30083
1331
0.300824
1437
0.300818
1408
0.300811
1412
0.300805
1480
0.300799
1464
0.300792
1483
0.300786
1500
0.30078
1504
0.300773
1635
0.300767
1604
0.30076
1567
0.300754
1663
0.300748
1621
0.300741
1589
0.300735
1665
0.300729
1679
0.300722
1655
0.300716
1668
0.30071
1631
0.300703
1641
0.300697
1652
0.300691
1665
0.300684
1664
0.300678
1703
0.300671
1725
0.300665
1781
0.300659
1745
0.300652
1755
0.300646
1733
0.30064
1809
0.300633
1850
0.300627
1727
0.300621
1764
0.300614
1805
0.300608
1865
0.300602
1851
0.300595
1774
0.300589
1894
0.300582
1895
0.300576
1882
0.30057
1849
0.300563
1774
0.300557
1785
0.300551
1764
0.300544
1788
0.300538
1754
0.300532
1799
0.300525
1741
0.300519
1794
0.300513
1716
0.300506
1697
0.3005
1713
0.300494
1657
0.300487
1673
0.300481
1682
0.300475
1609
0.300468
1616
0.300462
1562
0.300456
1519
0.300449
1629
0.300443
1535
0.300437
1514
0.30043
1473
0.300424
1432
0.300417
1374
0.300411
1367
0.300405
1309
0.300398
1200
0.300392
1172
0.300386
1145
0.300379
1103
0.300373
1023
0.300367
975
0.30036
914
0.300354
920
0.300348
855
0.300341
800
0.300335
777
0.300329
752
0.300322
692
0.300316
645
0.30031
570
0.300303
586
0.300297
529
0.300291
531
0.300284
506
0.300278
488
0.300272
405
0.300265
363
0.300259
347
0.300253
366
0.300246
291
0.30024
288
0.300234
236
0.300227
231
0.300221
241
0.300215
247
0.300208
221
0.300202
224
0.300196
189
0.300189
200
0.300183
207
0.300177
209
0.30017
209
0.300164
207
0.300158
229
0.300151
210
0.300145
196
0.300139
203
0.300132
210
0.300126
216
0.30012
208
0.300113
233
0.300107
224
0.300101
210
0.300095
220
0.300088
220
0.300082
211
0.300076
215
0.300069
198
0.300063
245
0.300057
216
0.30005
238
0.300044
207
0.300038
183
0.300031
203
0.300025
238
0.300019
224
0.300012
210
0.300006
235
0.3
209
0.299993
227
0.299987
249
0.299981
252
0.299974
215
0.299968
225
0.299962
263
0.299955
262
0.299949
226
0.299943
245
0.299937
228
0.29993
221
0.299924
233
0.299918
233
0.299911
248
0.299905
197
0.299899
228
0.299892
216
0.299886
188
0.29988
239
0.299873
235
0.299867
206
0.299861
238
0.299854
226
0.299848
218
0.299842
246
0.299836
235
0.299829
240
0.299823
229
0.299817
245
0.29981
235
0.299804
228
0.299798
236
0.299791
244
0.299785
247
0.299779
235
0.299772
229
0.299766
240
0.29976
268
0.299754
271
0.299747
242
0.299741
218
0.299735
235
0.299728
228
0.299722
256
0.299716
235
0.299709
235
0.299703
214
0.299697
245
0.299691
227
0.299684
244
0.299678
252
0.299672
269
0.299665
241
0.299659
241
0.299653
306
0.299646
231
0.29964
237
0.299634
260
0.299628
266
0.299621
247
0.299615
230
0.299609
257
0.299602
268
0.299596
271
0.29959
270
0.299583
231
0.299577
284
0.299571
260
0.299565
240
0.299558
230
0.299552
272
0.299546
283
0.299539
274
0.299533
271
0.299527
297
0.299521

FRESH EXPOSED BULK OF A SILICON WAFER (0.5 MM THICK, 90 DEG TOA)
2003
5
10
14
50
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_7
data_7
-1
Binding energy
eV
3
-0.023622
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
0
3.618
0.300125
0.300489
0
0.300489
0
0.300486
0
0.300483
0
0.30048
0
0.300477
0
0.300474
0
0.300471
0
0.300468
0
0.300466
0
0.300463
0
0.30046
0
0.300457
0
0.300454
0
0.300451
0
0.300448
0
0.300445
0
0.300443
0
0.30044
0
0.300437
0
0.300434
0
0.300431
0
0.300428
0
0.300425
0
0.300423
0
0.30042
0
0.300417
0
0.300414
0
0.300411
0
0.300408
0
0.300405
0
0.300402
0
0.3004
0
0.300397
0
0.300394
0
0.300391
0
0.300388
0
0.300385
0
0.300382
0
0.30038
0
0.300377
0
0.300374
0
0.300371
0
0.300368
0
0.300365
0
0.300362
0
0.300359
0
0.300357
0
0.300354
0
0.300351
0
0.300348
0
0.300345
0
0.300342
0
0.300339
0
0.300336
0
0.300334
0
0.300331
0
0.300328
0
0.300325
0
0.300322
0
0.300319
0
0.300316
0
0.300314
0
0.300311
0
0.300308
0
0.300305
0
0.300302
0
0.300299
0
0.300296
0
0.300293
0
0.300291
0
0.300288
0
0.300285
0
0.300282
0
0.300279
0
0.300276
0
0.300273
0
0.300271
0
0.300268
0
0.300265
0
0.300262
0
0.300259
0
0.300256
0
0.300253
0
0.300251
0
0.300248
0
0.300245
0
0.300242
0
0.300239
0
0.300236
0
0.300233
0
0.30023
0
0.300228
0
0.300225
0
0.300222
0
0.300219
0
0.300216
0
0.300213
0
0.30021
0
0.300208
0.916
0.300205
0
0.300202
0
0.300199
0
0.300196
0
0.300193
3.618
0.30019
0
0.300188
0
0.300185
0
0.300182
0
0.300179
0
0.300176
0
0.300173
0
0.30017
0
0.300167
0
0.300165
0
0.300162
0
0.300159
0
0.300156
0
0.300153
0
0.30015
0
0.300147
0
0.300145
0
0.300142
0
0.300139
0
0.300136
0
0.300133
0
0.30013
0
0.300127
0
0.300125
end of experiment
